发明名称 MOLD FOR TRANSFER AND TRANSFER METHOD
摘要 PROBLEM TO BE SOLVED: To provide a mold which is capable of performing accurate transfer with no residual film in a product, in a mold which is used in a transfer method for transferring a fine transfer pattern formed in the mold to the product to be molded. SOLUTION: The mold 3 for the transfer is manufactured by the formation into a flat plate shape by a material in which an electromagnetic wave with a specific wavelength permeates, and by forming the fine transfer pattern 5 by providing a recess part 23 on one thickness-directional surface 21, wherein a film 25 which blocks the electromagnetic wave with the specific wavelength is formed in a flat surface other than the recess part 23 among one surface 21. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008044289(A) 申请公布日期 2008.02.28
申请号 JP20060223791 申请日期 2006.08.21
申请人 TOSHIBA MACH CO LTD 发明人 KOKUBO MITSUNORI;HAGIWARA AKIHIKO;ISHIBASHI KENTARO
分类号 B29C33/38;B29C39/02;B29C39/26;B29C59/02;H01L21/027 主分类号 B29C33/38
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