| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition device in which, when a film is formed by a supercritical deposition method by use of at least a solid crude material, the solid crude material can be introduced into a deposition chamber at a constant speed; and to provide an introduction method of its crude material and a deposition method. SOLUTION: The device for use in deposition includes: the filming chamber; a dispenser for preparing a solid crude material solution obtained by dissolving the solid crude material in a supercritical carbon dioxide; a first supercritical carbon dioxide supply line for supplying supercritical carbon dioxide into the dispenser; a detector for monitoring a concentration of the solid crude material in the solid crude material solution; a flow velocity adjusting means for feeding back the concentration of the solid crude material obtained by the detector, and controlling a flow velocity of the solid crude material solution discharged from the dispenser so that an introduction speed of the solid crude material to be introduced into the deposition chamber is made constant; and a solid crude material introduction line for introducing the solid crude material solution discharged from the dispenser into the deposition chamber. COPYRIGHT: (C)2008,JPO&INPIT
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