| 摘要 |
PROBLEM TO BE SOLVED: To provide a prove unit capable of corresponding to narrow pitch layout, measuring positively without distortion of springs, and swapping easily of parts for damaged probes. SOLUTION: In the prove unit which is equipped with a prove 100 and a prove supporting section 200 fitting the prove 100 on a probe card, the probe supporting section 200 includes a first guide plate 210, which has a first aperture 211 corresponding to a layout pattern of an electrode pad 811 of a semiconductor integrated circuit 810 as object to be measured, a second guide plate 220, which has a second aperture 221 corresponding to the layout pattern, and a spacer 230 connecting both the guide plates 210 and 220 in parallel, while a thickness dimension of the first guide plate 210 is smaller than a length dimension from a flange section 113 to the apex of a contacting section 111 of the probe 100, the first aperture 211 is larger than the contacting section 111 and smaller than the flange section 113 in diameter size, the second aperture 221 is larger than a guide tube 130 and also larger than a spring 120 in diameter size, and distance between both the guide plates 210 and 220 is smaller than the length dimension from the flange section 113 to the apex of the contacting section 112. COPYRIGHT: (C)2008,JPO&INPIT
|
