METHOD OF FORMING A PASSIVATION LAYER ON A SURFACE OF A HIGH-ENERGY RADIATION DETECTOR SUBSTRATE AND A HIGH-ENERGY RADIATION SUBSTRATE

摘要

A method for forming an inter-pixel passivation layer over a surface of a high-energy radiation detector substrate supporting a multiplicity of conductive pixel pads is disclosed. The method comprises forming a layer of low resistivity material over the surface of the detector substrate and the multiplicity of conductive pixel pads, the low resistivity material being anodisble to grow a coherent oxide; anodising the low resistivity material over its volume thereby forming a coherent oxide layer; and etching the oxide layer to expose one or more of the conductive pixel pads.