FABRICATION OF AN INTEGRATED TERAHERTZ SOURCE USING FIELD EMITTER ARRAY WITH GRATING STRUCTURE
摘要
<p>The present invention provides for a fabrication of an integrated THz source. The fabrication includes integrating a field emitter array (FEA) with a grating by utilizing micro-electromechanical system (MEMS) and grating fabrication methods to build the FEA device upon a moveable surface that can be rotated perpendicular to the other, and locked into alignment or alternately finely adjusted.</p>
