| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of attaining integration with a circuit, and compactification of a size. <P>SOLUTION: An upper electrode 6 serving as a perturbative weight is formed in a surface side of a piezoelectric membrane 4, and a lower electrode 3 is formed in a reverse face side thereof. Comb-toothed electrodes 7-10 for detection are provided in both sides of the upper electrode 6 serving as the perturbative weight. The angular velocity sensor of such constitution can vibrate the upper electrode 6 serving as the perturbative weight vertically (direction perpendicular to a substrate), by impressing a direct drive voltage to the upper electrode 6 serving as the perturbative weight. An angular velocity is detected thereby based on the vibration of the upper electrode 6 serving as the perturbative weight. Resultingly, a driving comb-toothed electrode and a reflector are not required to be arrayed along one direction around the comb-toothed electrode as the center although required in the prior art, the angular velocity sensor is compactified because only the comb-toothed electrodes 7-10 are enough to be arranged, and the integration with the circuit is allowed when constituting the angular velocity sensor together with the circuit. <P>COPYRIGHT: (C)2008,JPO&INPIT |
