发明名称 SLOPED CANTILEVER BEAM ELECTRODE FOR A MEMS DEVICE
摘要 A method of tilting a micromirror (202) comprises providing a substrate, a sloped electrode (210) outwardly from the substrate (220), and a sloped electrode positioning system outwardly from the substrate. The method also includes applying, by the sloped electrode positioning system, forces sufficient to position the sloped electrode in an orientation that slopes away from the substrate.
申请公布号 WO2008017004(A2) 申请公布日期 2008.02.07
申请号 WO2007US75016 申请日期 2007.08.02
申请人 TEXAS INSTRUMENTS INCORPORATED;MANGRUM, BRETT, A. 发明人 MANGRUM, BRETT, A.
分类号 G02B26/00 主分类号 G02B26/00
代理机构 代理人
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