| 摘要 |
PROBLEM TO BE SOLVED: To easily acquire an intensity of a line unevenness while detecting precisely the line unevenness. SOLUTION: In an inspection device, a plurality of binarized images corresponding to a plurality of thresholds are acquired by binarizing a multigradation objective image with the plurality of thresholds, in a binarized image acquiring part 62, and a line area of a closed area with a prescribed value or more of compression is specified in each of the plurality of binarized images, in a line area specifying part 63. An area group indicating the line unevenness is found in an area group acquisition part 64, by grouping the line areas overlapped each other in the two binarized images with the adjacent thresholds to include those the same area group, and a range of the threshold corresponding to the binarized image with the line area existing therein is acquired as the intensity of the line unevenness, as to the each group, in a line unevenness intensity acquisition part 65. The unevenness inspection device can thereby acquire easily the intensity of the line unevenness while precisely detecting the line unevenness. COPYRIGHT: (C)2008,JPO&INPIT
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