HEAT TREATMENT APPARATUS AND METHOD,申请号KR20010073560-传众专利搜索

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发明名称	HEAT TREATMENT APPARATUS AND METHOD
摘要
申请公布号	KR100785579(B1)	申请公布日期	2007.12.13
申请号	KR20010073560	申请日期	2001.11.24
申请人		发明人
分类号	H01L21/31;H01L21/324;C30B33/00;H01L21/00;H01L21/316	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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