发明名称 METAL DETECTING REAGENTS AND METHODS OF MONITORING CLEANING SOLUTIONS USING THE SAME
摘要 A metal detecting reagent and a method for monitoring a cleaning liquid using the same are provided to detect metal ions easily even at a low concentration by forming a complex compound easily because of a superior reactivity about the metal ions. A reagent including an ammonium salt and a chelate agent for detecting a metal is prepared(S10). A mixed solution is manufactured by adding the reagent for detecting a metal to a cleaning liquid(S20). A metal ion is detected by measuring an absorbance of the mixed solution(S30), using maximum absorbance in the wavelength range of 560 nm to 650 nm.
申请公布号 KR100785437(B1) 申请公布日期 2007.12.13
申请号 KR20060126927 申请日期 2006.12.13
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HONG, HYUN KEE;LEE, JAE SEOK;LEE, YANG KOO;YI, HUN JUNG
分类号 H01L21/66;H01L21/304 主分类号 H01L21/66
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