| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric resonator chip with high reliability capable of realizing high performance and high stability of the electric characteristics of a piezoelectric resonator by eliminating the effect of mask deviation in the case of executing frequency adjustment by means of dry etching, and to provide a frequency adjustment method for the piezoelectric resonator chip. <P>SOLUTION: The piezoelectric resonator chip comprises: a base part 20; and a plurality of legs 21, 22 projected from the base part, each leg is provided with frequency adjustment films 25, 26 formed to a tip of a leg principal side and exciting electrodes 23, 24 formed to the legs, and the type of material of the surface of the exciting electrodes has an elimination rate by the dry etching lower than that of the type of the material of the surface of the frequency adjustment films. <P>COPYRIGHT: (C)2007,JPO&INPIT |
