| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process plasma generator allowing plasma generation of a large-area (large-scale) or three-dimensionally arbitrary shape, capable of simply generating plasma in a vessel/place having an arbitrary shape, and of easily implementing its material processing application. <P>SOLUTION: A flexible sheet substrate 10 having a thickness of 10 μm to 1 mm is formed by jointing a metal thin film for an electrode or a coil, for instance, a copper layer 12 to a flexible film, for instance, a polyimide layer 11. By using air for a plasma gas, and by supplying microwave power of 2.45 Ghz to an electrode gap 14 in a condition of 80 Torr, thermal nonequilibrium plasma is generated. <P>COPYRIGHT: (C)2007,JPO&INPIT |
