| 摘要 |
PROBLEM TO BE SOLVED: To prevent a coating liquid from turning around to the edge of a substrate by suppressing occurrence of rise of a coating film of the coating liquid at the coating finishing point as much as possible. SOLUTION: The coating method involves a coating step of applying a coating liquid 30 by horizontally moving a coating liquid supply nozzle 14 while keeping it at a first height h1 from the substrate 20; a nozzle lowering step of lowering the coating liquid supply nozzle 14 to a second height h2 after the coating liquid supply nozzle 14 reaches the coating finishing point P; a suction step of sucking the coating liquid 30 on the substrate 20 at the coating finishing point P through the coating liquid supply nozzle 14 to keep a bead 34 by keeping the coating liquid supply nozzle 14 at the second height h2; and a nozzle moving step of horizontally moving the coating liquid supply nozzle 14 in the direction same as the moving direction of the coating liquid supply nozzle 14 in the coating step until the head 34 is severed as it remains at the second height h2 after the suction step. COPYRIGHT: (C)2007,JPO&INPIT |
