| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro valve capable of blocking completely a fluid flow in a fine passage with structure simple and incorporable easily into a micro total analysis system, and sending quickly the fluid even when a module causing a large pressure loss exists on the downstream of the fine passage. SOLUTION: This micro valve is characterized as follows: an opening part formed on one end of a visco-elastic body storage tank is opened to the fine passage formed between at least two substrates; the other end of the visco-elastic body storage tank is communicated with a pump through a gas discharge fine passage; the visco-elastic body is stored in the visco-elastic body storage tank; and the visco-elastic body is moved into the fine passage by being pressurized by the pump, to thereby enable blocking of the fine passage. COPYRIGHT: (C)2007,JPO&INPIT
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