ELECTROOPTICAL REFLECTOR DEVICE AND CORRESPONDING ACTUATION METHODS

摘要

MEMS electrooptical digital reflector device that comprises a conductor element (7), which is a separate part mechanically independent from its environment and moves through an intermediate space (5) of the device as a function of voltages present on capacitor plates (1, 2, 3), and a reflective surface (19), which reflects an incident light beam and is integral with the conductor element (7). The conductor element (7) moves in the intermediate space (5) until its rests on rest points arranged such as to force the conductor element (7) to change orientation. Method for actuating the above MEMS device, which comprises the application of voltages to the plates such that the conductor element changes orientation. The conductor element can also move in the intermediate space over such a distance that it generates interference as a function of the position of the conductor element.