| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polishing technology which prevents scratch, peeling, dishing, and erosion, and does not need complex cleaning process and complex abrasive powder supply/disposal apparatus, to reduce cost of expendable supplies such as abrasive powder, polishing cloth. <P>SOLUTION: A metal film 21 formed on an insulating film 23 having grooves is polished with the polishing cloth by using a polishing solution which includes a substance making an oxidizer and an oxide water-soluble, does not include abrasive grains substantially, and polish solution that shows a property of a corrosion condition for a metal film. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
