IMAGE SENSOR WITH PIXEL WITH HIGH FILL FACTOR AND METHOD FOR FORMING IMAGE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an image sensor with a pixel with a high fill factor and a method for forming the image sensor.

SOLUTION: The image sensor is provided with an array of photoelectric transfer elements arranged in rows and columns which extend in the first direction and the second direction in a substrate, respectively. A plurality of first junction isolation regions and a plurality of second junction isolation regions are located in the substrate. Each of the first junction isolation regions separates side parts of the photoelectric transfer elements which are adjacent to each other in the common row. Each of the second junction isolation regions separates side parts of the photoelectric transfer elements which are adjacent to each other in the common column. A plurality of insulated separation regions are located in the substrate. Each of the insulated separation regions separates corner parts of the photoelectric transfer elements which are adjacent to each other. In one embodiment, the photoelectric transfer element has first pitches in the first direction and has a second pitches in the second direction. The first pitches of the photoelectric transfer elements in the common row are substantially identical with each other, and the second pitches of the photoelectric transfer elements in the common column are substantially identical with each other.

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