| 摘要 |
An apparatus of measuring characteristics of a plurality of semiconductor devices with a plurality of measurement units is disclosed. The apparatus includes a parallel measurement executability determination section and a plurality of measurement function sections. The parallel measurement executability determination section identifies sets of a semiconductor device and a measurement function, which are able to be measured in parallel based on connection information of the semiconductor devices. The plurality of measurement function sections use a first abstractive name which abstractively identifies the plurality of measurement units for the sets of the measurement functions and the semiconductor device which are able to be measured in parallel by the parallel measurement executability determination section.
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