| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a baking device and a baking method of ceramic substrate, capable of solving warping and cracking caused by pressure baking and non-pressure baking, inhibition of contraction and residual stress of a substrate. <P>SOLUTION: A spacer 6 is disposed between a setter 2 and a setter 5, and the distance between a ceramic substrate 7 and the setter 5 is changed according to thermal expansion and thermal contraction of the spacer 6 to switch the ceramic substrate 7 between a pressurized state and a non-pressurized state in baking and annealing of the ceramic substrate 7. <P>COPYRIGHT: (C)2007,JPO&INPIT |
