| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator capable of preventing a resonance from adhering to a substrate, and suppressing deterioration of a resonance characteristic. <P>SOLUTION: The thin film piezoelectric resonator includes a substrate having a cavity on the surface, a lower electrode 14 extending on the cavity from the upper face of the substrate, a piezoelectric film 16 provided on the lower electrode 14, an upper electrode 18 disposed opposite to the lower electrode 14 on the piezoelectric film 16, and a plurality of protrusions 24a-24e provided below the lower electrode 14 in the cavity. <P>COPYRIGHT: (C)2007,JPO&INPIT |
