| 摘要 |
A novel method of classifying physical structures on a substrate. In certain embodiments, the method includes receiving a perceived image of a substrate, and classifying a physical structure on the substrate by comparing the perceived image to a simulated image. The perceived image may be received from a RDA tool, and the simulated image may be generated by software that models the effect of a candidate structure, i.e., a simulated physical structure, on radiation of the sort used to obtain the perceived image. Comparing the perceived image to the simulated image may include comparing the perceived image to a library of simulated images or analyzing the perceived image with a simplified model that is based on simulated images. By comparing the perceived image of an unknown physical structure to a simulated image of a known candidate structure, the unknown physical structure may be classified.
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