INSPECTION METHOD OF PASTE PATTERN

摘要

A method of inspecting a paste pattern is provided to uniformly coat paste on the surface of a substrate by detecting the height of the substrate in real time through a laser displacement sensor. A method of inspecting a paste pattern includes the steps of placing a substrate on a stage of a paste coating apparatus, coating paste on the substrate with a dispense head, measuring the interval between a substrate surface and a nozzle of the dispense head through a detecting device, storing the data of height of the substrate surface measured by the detecting device, detecting the data which is out of a pre-set range among the measured data, recognizing the data out of the pre-set range as an inspection position, moving the dispense head to the inspection position, and inspecting defects in the inspection position.