| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can suppress a bad influence of machining dust upon the laser beam machining to a minimum by effectively preventing the scatter of the machining dust produced during laser beam machining into the air. <P>SOLUTION: In a dust collecting device 30, the machining dust passes a plurality of partitioned sections 32a in a flow straightening section, and then arrives at receiving pan portions 33. In this case, the air flow generated by the suction by a pump (not shown in the figure) is parallel to the wall surfaces (partition walls 32) of a plurality of the partitioned sections 32a in the flow straightening section 31. As a result, the machining dust D to stick to the partition walls 32 of the flow straightening section 31 can be suppressed to a minimum. The machining dust D reached to the receiving pan portions 33 is sucked through suction ports 33a formed in the bottom portions of the receiving pan portions 33, and is carried to the pump (not shown in the figure) via suction ducts 36. The flow straightening section 31 of the dust collecting device 30 is arranged so as to separate from the vapor-deposited thin film of the substrate of a solar battery by a required distance. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
