Assembly to generate periodic high-resolution laser image on substrate has diffraction beam divider

摘要

An assembly generates a periodic spatial, high-resolution, high-power, laser light pattern on a substrate. The assembly consists of a laser light source emitting a parallel beam directed at a diffraction beam-divider. The assembly further has an image-generating lens focused on a substrate, and simultaneously placing an interference overlay image on the divided beams within the optical field. The size of the substrate target area and light intensity is chosen such that the local intensity is slightly less than the destruction threshold. The image optics (24) consists of a concave first mirror and a convex mirror.