发明名称 |
HEAT TREATMENT APPARATUS |
摘要 |
<p>A heat treatment apparatus is provided with a treatment container, which stores a plurality of subjects to be treated at multiple levels and performs prescribed heat treatment to the subjects; a cylindrical heater arranged to cover the treatment container for heating the subjects; a heat exhausting system for exhausting a space between the heater the treatment container of the atmosphere; and a cooling means for blowing a cooling fluid into the space for cooling the treatment container. The heater is provided with a cylindrical heat insulating material, and a heat element arranged on the inner circumference of the heat insulating material. The cooling means is provided with a plurality of jetting nozzles embedded in the heat insulating material. Each jetting nozzle is formed in a shape wherein the inlet and the outlet do not linearly connected.</p> |
申请公布号 |
WO2006134862(A1) |
申请公布日期 |
2006.12.21 |
申请号 |
WO2006JP311736 |
申请日期 |
2006.06.12 |
申请人 |
TOKYO ELECTRON LIMITED;NAKAO, KEN;KATO, KAZUHIKO |
发明人 |
NAKAO, KEN;KATO, KAZUHIKO |
分类号 |
H01L21/22;C23C16/46;H01L21/205 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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