发明名称 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern |
摘要 |
In order to provide an imaging-recipe arranging or creating apparatus and method adapted so that selection rules for automatic arrangement of an imaging recipe can be optimized by teaching in a SEM apparatus or the like, the imaging-recipe arranging or creating apparatus in this invention that arranges an imaging recipe for SEM-observing a semiconductor pattern using a scanning electron microscope includes a database that receives and stores layout information of the above semiconductor pattern in a low-magnification field, and an imaging-recipe arranging unit which, on the basis of the database-stored semiconductor pattern layout information, arranges the imaging recipe automatically in accordance with the automatic arrangement algorithm that includes teaching-optimized selection rules for selecting an imaging point(s).
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申请公布号 |
US2006284081(A1) |
申请公布日期 |
2006.12.21 |
申请号 |
US20060330215 |
申请日期 |
2006.01.12 |
申请人 |
MIYAMOTO ATSUSHI;NAGATOMO WATARU;MATSUOKA RYOICHI;MOROKUMA HIDETOSHI;SUTANI TAKUMICHI |
发明人 |
MIYAMOTO ATSUSHI;NAGATOMO WATARU;MATSUOKA RYOICHI;MOROKUMA HIDETOSHI;SUTANI TAKUMICHI |
分类号 |
G21K7/00 |
主分类号 |
G21K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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