发明名称 |
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device 90 in which migration is restrained from occurring. SOLUTION: The method of manufacturing a semiconductor device 90 comprises processes of: forming a projection 30 containing two or more resin projections 12 and an intermediate 32 located between them apart from two or more electrodes 22; forming two or more conductive layers 20 which extend from above the electrodes 22 to the surface of the resin projection 12; and removing the intermediate 32 through a plasma treatment using the conductive layer 20 as a mask, and forming two or more projection electrodes 10. The projection 30 is configured so as to make the length of a profile 32a of the intermediate 32 between the adjacent conductive layers 20 longer than the shortest distance W between the adjacent conductive layers 20. COPYRIGHT: (C)2007,JPO&INPIT |
申请公布号 |
JP2006269895(A) |
申请公布日期 |
2006.10.05 |
申请号 |
JP20050088139 |
申请日期 |
2005.03.25 |
申请人 |
SEIKO EPSON CORP |
发明人 |
KATO HIROKI |
分类号 |
H01L23/12;H01L21/3205;H01L23/52 |
主分类号 |
H01L23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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