发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE HAVING ORGANIC THIN FILM TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic thin film transistor having a fine pattern form only by means of a printing method and having correctly positioned lower and upper electrodes self-alignedly opposing via an insulation film without using a photomask. SOLUTION: Since the lower electrode is used as the photomask to align in position with the upper electrode, no shift in position occurs even if the printing method is employed. Thus, a semiconductor device such as a flexible substrate using an organic semiconductor can be inexpensively formed by the printing method. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006269709(A) 申请公布日期 2006.10.05
申请号 JP20050085288 申请日期 2005.03.24
申请人 HITACHI LTD 发明人 ARAI TADASHI;SAITO SHINICHI
分类号 H01L29/786;H01L21/336;H01L51/05 主分类号 H01L29/786
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