| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect angular velocity in the directions of two axis or more in the spactial axis direction by an inertial sensor of a shape that is easily formed. <P>SOLUTION: There are formed a pair of vibration parts, having a base part and a plurality of prism-shaped leg parts extended in a symmetric direction putting the base part in between, in the two spatial axis directions that perpendicularly cross from the base part. The base part and each vibration part of the inertial sensor are formed in a single body with a piezoelectric material. <P>COPYRIGHT: (C)2007,JPO&INPIT |
