| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently manufacture a laminated substrate of high quality, which is constituted so as to well peel a support layer from a resin layer, by a simple process and a simple constitution. <P>SOLUTION: The manufacturing apparatus 20 of the laminated substrate is constituted by arranging a cooling mechanism 110 which is constituted so as to forcibly cool a joined substrate 24a, which is obtained by bonding a photosensitive web 22 to a glass substrate 24 so as to allow a cushioning layer to go toward the glass substrate 24 in a joining mechanism 42, a heating mechanism 112 for heating the cushioning layer to a predetermined temperature range lower than a glass transition temperature and a peel mechanism 116 which peels a base film from the heated joined substrate 24a in the direction shown by an arrow C. <P>COPYRIGHT: (C)2007,JPO&INPIT |
