发明名称 INSTRUMENT AND METHOD FOR MEASURING TERAHERTZ PULSE LIGHT
摘要 <p><P>PROBLEM TO BE SOLVED: To obtain a plurality of time-serial waveforms for reducing a noise component by one time delay operation. <P>SOLUTION: A sample is irradiated with terahertz pulse light L6 generated in a terahertz light generator 5, so as to detect a time-serial change with time of intensity in an electric field of a terahertz pulse light L8 transmitted through the sample S by a terahertz light detector 8. The intensity in the electric field of the terahertz pulse light L8 transmitted through the sample S is detected finely with a prescribed delay time interval, during the one time delay operation for moving a turning mirror 11 by a distance d along an A direction from an original position. A storage circuit 21 stores an electric field intensity data together with positional information of the turning mirror 11 corresponding to the time delay amount in the detection. A computing circuit 22 extracts the plurality of electric field intensity data in every of the prescribed delay time amounts from the storage circuit 21 to obtain the plurality of time-serial waveforms, and the respective time-serial waveforms are Fourier-transformed respectively to obtain a plurality of spectral waveforms. The plurality of spectral waveforms include respectively a plurality of amplitude information pieces and a plurality of phase information pieces, and the computing circuit 22 averages further the plurality of amplitude information pieces or phase information pieces. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006266908(A) 申请公布日期 2006.10.05
申请号 JP20050086262 申请日期 2005.03.24
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 KANOUCHI YOSHINORI;KUROO SHINICHI
分类号 G01N21/35;G01N21/3563;G01N21/3586 主分类号 G01N21/35
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