| 摘要 |
PROBLEM TO BE SOLVED: To simply remove a ring artifact from the internal structure data of an inspection target. SOLUTION: Reconstituted data is formed by reconstituting each projected image acquired by irradiating the inspection target arranged at a position not overlapped with the rotary shaft on a rotary means with X rays and the cross section data 31 vertical to the rotary shaft of the reconstituted data is subsequently acquired while an angle rangeθ1, wherein the data 7a of the inspection target itself is not present from a peripheral edge part to the rotary shaft 15, is detected in this cross section data 31 and the dummy cross section data 35 excepting the data 7a of the inspection target itself is formed with respect to an angle range (360°-θ1), wherein the data 7a of the inspection target itself is present, on the basis of the cross section data (genuine cross section data) 34 of the angle rangeθ1 wherein the data 7a of the inspection target itself is not present while the difference between the cross section data 31 of the reconstituted data and the cross section data 36 comprising the genuine cross section data 34, and the dummy cross section data 35 is calculated to obtain the cross section data 7a of the internal structure data of the inspection target itself. COPYRIGHT: (C)2007,JPO&INPIT
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