| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a deposition mask having the excellent positional accuracy of a pattern part even with a body frame of low strength with a sash removed therefrom when manufacturing the deposition mask by affixing a metal mask on a screen fabric, and transferring the metal mask to the body frame. SOLUTION: The method of manufacturing the deposition mask comprises: a step (1) of affixing a screen fabric to a screen fabric affixing frame; a step (2) of affixing a metal mask rolled web to the screen fabric; a step (3) of removing the screen fabric in contact with the metal mask, and applying the tension to the rolled web; a step (4) of overlapping the rolled web on a glass plotting plate, applying the load to the screen fabric affixing frame, and matching a mark of the metal mask with a mark of the glass plotting plate; a step (5) of placing a body frame of a deposition mask without any sash in place of the glass plotting plate; a step (6) of applying the load to the body frame, and setting the internal stress to the load equal to the internal stress to the tension of the rolled web; a step (7) of affixing the metal mask to the body frame; and a step (8) of removing the screen fabric and a margin around the rolled web and transferring the metal mask to the body frame. COPYRIGHT: (C)2007,JPO&INPIT
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