发明名称 Composite body
摘要 A composite body is joined together of at least two bodies ( 13, 16 ), wherein the first body ( 16 ) is a component-or monolithically comprises a component-with very stringent requirements on the precision of its surface (typically an optical component) and wherein the second body ( 13 ) can have the broadest diversity of functions, for example carrying parts of a position-measuring arrangement or optical surfaces. Each of the two bodies ( 13, 16 ) has at least one connecting surface area ( 21 ), and the at least two respective connecting surface areas ( 21 ) lie opposite each other. Within the at least one connecting surface area ( 21 ) of one of the two bodies ( 13, 16 ) or in the proximity of said connecting surface area ( 21 ), at least one constructive means is arranged for isolating the first body ( 16 ) and/or the second body ( 13 ) from deformation.
申请公布号 US2006192328(A1) 申请公布日期 2006.08.31
申请号 US20050304055 申请日期 2005.12.14
申请人 CARL ZEISS SMT AG 发明人 MORRISON FRASER;LIPPERT JOHANNES;KWAN YIM-BUN P.;OCHSE ANDREAS
分类号 F16F13/00 主分类号 F16F13/00
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