| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor capable of fixing a wafer at a predetermined position. SOLUTION: The susceptor has a base plate 1 on which the wafer is mounted; and a ring plate 2 detachably mounted on the base plate having recessed wafer pockets 21a-21f formed for receiving the wafer, when mounted on the base plate 1 and equipped with a tapered portion 22a on a side face of the wafer pockets 21a-21f, so that an aperture diameter of the pockets 21a-21f narrows from the bottom toward an opening of the pockets 21a-21f. COPYRIGHT: (C)2006,JPO&NCIPI |
