METHOD FOR MAINTENANCE OF FUNCTIONAL LIQUID SUPPLY DEVICE, FUNCTIONAL LIQUID SUPPLY DEVICE, LIQUID DROP DISCHARGE DEVICE, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide such a method for maintenance of a functional liquid supply device or the like that can detect an abnormal leakage of air if any in an air passage from a pressure pump to a functional liquid tank. SOLUTION: The method is provided with an air supply process supplying a predetermined amount of air by driving the pressure pump 112, a leakage time measuring process for measuring as a leakage time a time of flowing out a predetermined amount of air to the outside after the air supply process, a leakage detection process for detecting any abnormal leakage of air in the device based on the amount of air supplied from the air supply process and the measured leakage time, and an alarm process of alarming when any abnormal leakage is detected. COPYRIGHT: (C)2006,JPO&NCIPI