发明名称 |
SILICON GAS INJECTOR AND METHOD OF MAKING |
摘要 |
<p>A gas injector tube (40) usable in a batch thermal treatment oven including two silicon shells (54, 56) joined together with an adhesive formed of a fine silicon powder and a curable silica-forming agent, such as a spin-on glass, which is ultrasonically homogenized. The tube may have a gas outlet (52) on its distal end or be sealed with a silicon cap (86) and have side outlet holes (84) formed along its side. The silicon injector tube may be used in combination with a silicon tower and a silicon liner so that all bulk parts within the furnace hot zone are formed of silicon.</p> |
申请公布号 |
WO2006091413(A2) |
申请公布日期 |
2006.08.31 |
申请号 |
WO2006US04991 |
申请日期 |
2006.02.13 |
申请人 |
ZEHAVI, RANAAN;INTEGRATED MATERIALS, INC.;REYNOLDS, REESE |
发明人 |
ZEHAVI, RANAAN;REYNOLDS, REESE |
分类号 |
B32B37/00;C23C16/00;F16K51/00;F27D5/00 |
主分类号 |
B32B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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