| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal optical device and a spherical aberration correcting method which reduce the generation of spherical aberrations. SOLUTION: There are provided a driving mechanism 8 for moving a sample table 7 so that the interval between an objective lens 5 and the sample table is changed; a spherical aberration correction element 4, disposed between a light source 1 and the objective lens 5; a reference position detection part 15 for detecting the position of the sample table, when the focal position of the objective lens 5 coincides with the surface of a sample, on the basis of the detection result of a photodetector; a moving amount introducing part 16 for calculating the moving amount of the sample table 7, until the focal position of the objective lens 5 agrees with the object to be measured in the sample and for introducing the in-sample depth of the object to be measured, on the basis of the detection result of the photodetector 12; and a correction control part 17 for controlling the spherical aberration correction element 4, according to the in-sample depth of the object to be measured. COPYRIGHT: (C)2006,JPO&NCIPI
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