| 摘要 |
An apparatus for manufacturing a semiconductor device comprises a planarization mechanism section which pressurizes a top of a bump that is provided onto at least one of a substrate and a semiconductor chip and makes the top of the bump flat, and a bonding mechanism section which bonds the substrate with the semiconductor chip via the bump whose top has been made flat by the planarization mechanism section. The planarization mechanism section has a bump recognition camera which takes an image of bumps, a planarization tool with a pressurizing surface which pressurizes the top of the bump, and a driving mechanism which controls to move the planarization tool to a position of the bump detected by the bump recognition camera, the driving mechanism comprising a pressurization mechanism which presses the pressurizing surface of the planarization tool against the bump.
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