LASER ABLATION APPARATUS, LASER ABLATION METHOD, SAMPLE ANALYZER AND SAMPLE ANALYZING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser ablation apparatus capable of enhancing the analyzing precision of a sample regardless of a change in the surface state of the sample, and to provide a laser ablation method, a sample analyzer and a sample analyzing method. SOLUTION: The sample analyzer 1 is equipped with a laser ablation unit 3 for irradiating the sample 2 supported on the sample stand 6 in a sample chamber 5 with a laser beam to finely pulverize a part of the sample 2, an element detecting unit 4 for detecting the constituent element contained in the sample 2 and a controller 37. A laser displacement meter 18 for detecting the surface shape of the sample 2 is provided above the sample chamber 5. The controller 37 has a laser control part for controlling a sample stand driving part 7 so as to match the focus of the laser beam with the surface of the sample 2 on the basis of the measured value of the laser displacement meter 18 and an analyzing part for inputting the detected value of the element detecting unit 4 to perform predetermined analyzing processing. COPYRIGHT: (C)2006,JPO&NCIPI