| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an electrostatic chuck with superior cooling performance by providing at low cost a joining method for a dielectric layer and a base or jacket which increases the adhesion of a join layer and also causes neither flexure nor curving at the same time. SOLUTION: While an aluminum-made brazing sheet is used as the join layer, the ceramic-made dielectric layer and an aluminum-made base or jacket are joined to each other by minimum pressure (5×10<SP>-5</SP>to 1×10<SP>-5</SP>Torr, 590 to 605°C, a pressing force of 0 to 10 kgf/cm<SP>2</SP>). COPYRIGHT: (C)2005,JPO&NCIPI |
