| 摘要 |
PURPOSE:To reduce the intrasurface temp. gradient of a substrate to be treated by selectively sticking a microwave shielding film to a microwave transmitting window so as to make radiated microwaves uniform. CONSTITUTION:A patterned microwave shielding film 8 is stuck to the microwave transmitting window 4 of a microwave heater. The film 8 is formed by vapor-depositing or sputtering a metal having high electric conductivity such as Al or Cu. The shape of the film 8 may be circular. When the microwave heater is used, the intrasurface temp. gradient of a semiconductor substrate 7 to be treated is reduced and the surface of the substrate 7 is uniformly degassed and preheated. |
