| 摘要 |
PURPOSE:To manufacture highly thin piezoelectric ceramics and reduce the man-hour therefor by forming the piezoelectric ceramics after implanting chemical elements composing ceramics in the order of decreasing weight of each element into a raw material for an electrode with an ion implantation process. CONSTITUTION:Piezoelectric ceramics are formed by implanting chemical elements composing ceramics in the order of decreasing weight of each element into a raw material for an electrode with an ion implantation process. For instance, when the piezoelectric ceramics indicated by an expression; Pb(Zr0.53, Ti0.47)O3 is manufactured, the piezoelectric ceramics Pb(Zr0.53, Ti0.47)O3 are formed at a prescribed depth by implanting in sequence at the prescribed depth Zr, Ti, O having a designated amount of them at a composition ration of the piezoelectric ceramic to a lead foil of about 0.1 mm thick. This approach eliminate the need for performing an electrode formation process and yet, makes it possible to form the very thin piezoelectric ceramics of around 0.5-5 mum. |
