发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT AND ITS MANUFACTURE
摘要 PURPOSE:To enhance a reverse-direction current-amplification factor by a method wherein a lower separation-region and a buried base region are driven in earlier than the diffusion of an upper separation-region so that the two regions can be formed by diffusion at the low impurity-concentration and in a deep manner. CONSTITUTION:A first and a second buried layers 23a, 23b, an IIL buried base region 29 and a lower separation-region 34 for an upper-and-lower separation region 34 are formed on a P-type semiconductor substrate 21. Then, an upper region 35 on the region and an IIL base extraction region 32 are formed so as to reach each region 34 and the region 29 from the surface of an epitaxial layer 22 during a diffusion process of a base region 26 for an NPN transistor. Then, a collector contact region 28, an IIL collector region 31 and a color region 32 are formed during the diffusion process of an emitter region 27 for the NPN transistor.
申请公布号 JPS63155656(A) 申请公布日期 1988.06.28
申请号 JP19860302309 申请日期 1986.12.18
申请人 SANYO ELECTRIC CO LTD 发明人 OKODA TOSHIYUKI;TABATA TERUO
分类号 H01L29/73;H01L21/331;H01L21/8226;H01L27/02;H01L27/082;H01L29/732 主分类号 H01L29/73
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