| 摘要 |
PURPOSE:To increase the product yield of vapor grown films by using trays each made of isotropic graphite having a specified anisotropy ratio when passivation of an interlayer insulator is formed in a stage for producing super- LSI. CONSTITUTION:Isotropic petroleum or coal graphite having <=1.2 anisotropy ratio is easily and accurately worked and the expansion coefft. is nearly independent of a temp. change. Strain is hardly produced in the graphite and the graphite hardly warps and has high corrosion resistance, so trays for vapor growth are made of the graphite and used in a vapor growth stage. Silicon carbide layers re desirably formed on the surfaces of the trays. The pref. thickness of the layers is about 20-200mum. When the trays are used, vapor grown films are improved and the yield can be increased.
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