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发明名称
FORMATION OF HIGH MELTING METAL FILM
摘要
申请公布号
JPS6474720(A)
申请公布日期
1989.03.20
申请号
JP19870231025
申请日期
1987.09.17
申请人
TOSHIBA CORP
发明人
NAKADA RENPEI
分类号
C23C16/22;C23C16/30;H01L21/28;H01L21/285;H01L21/3205
主分类号
C23C16/22
代理机构
代理人
主权项
地址
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