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发明名称
TESTING DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0384482(A)
申请公布日期
1991.04.10
申请号
JP19890222149
申请日期
1989.08.28
申请人
FUJITSU LTD
发明人
KOIKE NAOYUKI
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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