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发明名称
PATTERN INSPECTING DEVICE
摘要
申请公布号
JPH03252875(A)
申请公布日期
1991.11.12
申请号
JP19900050931
申请日期
1990.03.02
申请人
NEC CORP
发明人
TAGA HINAKO
分类号
G01N21/88;G01N21/93;G01N21/956;G06T1/00;H05K13/08
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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