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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03270242(A)
申请公布日期
1991.12.02
申请号
JP19900071375
申请日期
1990.03.20
申请人
MITSUBISHI ELECTRIC CORP
发明人
TANIGUCHI AKIHISA;FUJITA KOICHI
分类号
H01L21/761;H01L21/338;H01L21/76;H01L29/812
主分类号
H01L21/761
代理机构
代理人
主权项
地址
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