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发明名称
METHOD OF PRODUCING A SEMICONDUCTOR DEVICE HAVING A DISORDERED SUPERLATTICE USING AN EPITAXIAL SOLID DIFFUSION SOURCE
摘要
申请公布号
US5108948(A)
申请公布日期
1992.04.28
申请号
US19880272493
申请日期
1988.11.17
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
MURAKAMI, TAKASHI;OTAKI, KANAMF;KUMABE, HISAO
分类号
H01L21/223;H01L21/18;H01S5/00;H01S5/20;H01S5/34
主分类号
H01L21/223
代理机构
代理人
主权项
地址
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